Crystal silicon substrates for nanophotonics research in industrial and academic applications.
Dimensions represent target values. For linear nanostamps, the period accuracy is better than 0.5% while groove depth and the width of line and space may differ from the target values by 15%. Substrate thickness is 0.675 +/- 0.050 mm.
Silicon nanostamps are available ex-stock with either linear grooves or 2D post/hole configuration.